Cryogenic temperature test chamber for the chip industry

With the cryogenic chamber for for the chip industry - Precise temperatures and clean room capability.

The newly developed test chamber is made entirely of stainless steel and is therefore cleanroom-compatible. The automatic door enables efficient loading and unloading of the system. A connection to manufacturing execution systems (SECS/GEM) and overhead hoist transfer systems is provided. Batches are recognised via QR codes, which enables seamless integration into existing production processes.

Our highlights:

• Installation in clean room (outside and inside); class ISO 5
• -75°C achievable
• Connection to Manufacturing Execution System (SECS/GEM)
• Connection to Overhead Hoist Transfer System (automatic door)
• Batch recognition via QR code

Included in the standard configuration:

• Nitrogen purging to generate an inert atmosphere 
• Oxygen measuring device 
• Automatically opening door 
• Hepa filtering of the supply air 
• Constant negative pressure in the machine section to prevent particle emission